Vol. 31, issue 02, article # 11
Andreev M. V., Bobrovnikov S. M., Gorlov E. V., Panchenko Yu. N., Puchikin A. V., Zharkov V. I. Numerical method for cavity alignment by output beam image. // Optika Atmosfery i Okeana. 2018. V. 31. No. 02. P. . DOI: 10.15372/AOO20180211 [in Russian].Copy the reference to clipboard
Abstract:
Numerical and experimental studies of the control of optical elements of the KrF-laser cavity using the image processing method are carried out. Different image binarization methods are considered as applied to determining the boundary dimensions and equalizing the intensity distribution of the laser beam. Conditions for rapid adjustment of the dispersion cavity in automatic mode of laser operation are ascertained, and the initial parameters of the output beam are retrieved within 5%.
Keywords:
excimer laser, image processing, binarization methods, laser beam, cavity, radiation intensity
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