The spectra of Xe-Cl2, Xe-Br2, and Xe-I2 excilamps excited by capacitive, glow, and barrier discharges are presented. The spectra of a barrier discharge Xe-Cl2 excilamp for different gas mixture pressure (60 and 120 Torr) are obtained and analyzed. The dependence of Kr-Cl2 capacitive discharge excilamp spectrum on the operation time is presented.